Electron energy distribution functions (EEDFs) at different radial positions are measured by a rf compensated Langmuir probe in a low-pressure solenoidal inductively coupled plasma. It is found that the measured EEDFs for trapped electrons with total energy ε<eφw (wall potential) are a function... mehr

The characteristics of high-density helicon wave plasma generated in a quartz tube of 10 cm in diameter have been studied. The optimum conditions for efficiently exciting helicon wave plasma have been investigated. It is also observed that plasma fully ionized by helicon waves has ion pumping... mehr

Studies on electron heating are done during the power coupling change in the discharge mode transition (E–H mode transition) in a planar inductive argon discharge without electrostatic screen (Faraday shield). The electron energy distribution function (EEDF) evolution is measured by the... mehr

Radio frequency power with a low frequency of 4 MHz is delivered to a solenoidal inductively coupled plasma at a low pressure of 1 mTorr. The electron energy distribution functions (EEDFs) are measured by a rf compensated Langmuir probe at different rf powers. As the rf power increases, a... mehr

Experiments on the propagation of an ion-acoustic soliton into a region of inhomogeneous plasma density are described. It is found that the local amplitude and velocity decrease and the width increases as the soliton propagates into a region of lower density. The results are in good agreement... mehr

The two-dimensional evolution of an ion-acoustic soliton from a grid with regular or random perturbations in the direction transverse to the direction of the soliton propagation is experimentally examined. The soliton initially follows the contour of the exciting grid but evolves into a planar... mehr

We report experimental observation of periodic oscillation in a steady state electron cyclotron resonance argon plasma that is not driven by extra periodic forces. We interpret the oscillation according to the predator-prey model, which is a nonlinear plasma-neutral coupling in the plasma... mehr

A new technique to determine the relative spatial distribution of radical concentration without Abel transformation is presented. By monitoring spatial light intensities with an optical probe inserted into the plasma, the relative spatial distribution of the radical species is investigated. The... mehr

SiOF films deposited by a helicon wave plasma chemical vapor deposition method has been characterized using Fourier transform infrared spectroscopy and ellipsometry. High density plasma of (approximately-greater-than)1012 cm−3 can be obtained on a substrate at low pressure (<10 mTorr) with rf... mehr